2020 Fall
MECENG 219 001 - LEC 001
Introduction to Microelectromechanical Systems
Liwei Lin
Aug 26, 2020 - Dec 11, 2020
Tu, Th
03:30 pm - 04:59 pm
Internet/Online
Class #:33971
Units: 3
Instruction Mode:
Remote Instruction
Offered through
Mechanical Engineering
Current Enrollment
Total Open Seats:
0
Enrolled:
Waitlisted:
Capacity:
Waitlist Max:
No Reserved Seats
Hours & Workload
3 hours of instructor presentation of course materials per week, and 6 hours of outside work hours per week.
Final Exam
FRI, DECEMBER 18TH
07:00 pm - 10:00 pm
Other classes by Liwei Lin
+ 1 Independent Study
Course Catalog Description
Fundamentals of microelectromechanical systems including design, fabrication of microstructures; surface micromachining, bulk-micromachining, LIGA, and other micro machining processes; fabrication principles of integrated circuit device and their applications for making MEMS devices; high-aspect-ratio microstructures; scaling issues in the micro scale (heat transfer, fluid mechanics and solid mechanics); device design, analysis, and mask layout.
Rules & Requirements
Credit Restrictions
Students will receive no credit for MEC ENG 219 after completing MEC ENG 219, or MEC ENG 219. A deficient grade in MEC ENG 219 may be removed by taking MEC ENG 219, or MEC ENG 219.
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
No Reserved Seats
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials
Associated Sections
None