2020 Fall
MECENG 119 001 - LEC 001
Introduction to MEMS (Microelectromechanical Systems)
Liwei Lin
Aug 26, 2020 - Dec 11, 2020
Tu, Th
03:30 pm - 04:59 pm
Internet/Online
Class #:28755
Units: 3
Instruction Mode:
Remote Instruction
Time Conflict Enrollment Allowed
Offered through
Mechanical Engineering
Current Enrollment
Total Open Seats:
11
Enrolled: 19
Waitlisted: 0
Capacity: 30
Waitlist Max: 5
No Reserved Seats
Hours & Workload
3 hours of instructor presentation of course materials per week, and 6 hours of outside work hours per week.
Final Exam
FRI, DECEMBER 18TH
07:00 pm - 10:00 pm
Other classes by Liwei Lin
+ 1 Independent Study
Course Catalog Description
Fundamentals of microelectromechanical systems including design, fabrication of microstructures; surface-micromachining, bulk-micromachining, LIGA, and other micro machining processes; fabrication principles of integrated circuit device and their applications for making MEMS devices; high-aspect-ratio microstructures; scaling issues in the micro scale (heat transfer, fluid mechanics and solid mechanics); device design, analysis, and mask layout.
Rules & Requirements
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
No Reserved Seats
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials
Associated Sections
None