2024 Fall
ELENG 143 001 - LEC 001
Microfabrication Technology
Grigory Tikhomirov
Class #:28602
Units: 4
Instruction Mode:
In-Person Instruction
Offered through
Electrical Engineering and Computer Sciences
Current Enrollment
Total Open Seats:
4
Enrolled: 36
Waitlisted: 0
Capacity: 40
Waitlist Max: 20
Open Reserved Seats:
3 unreserved seats
1 reserved for Students with Enrollment Permission
Hours & Workload
6 hours of outside work hours per week, 3 hours of instructor presentation of course materials per week, and 3 hours of instructional experiences requiring special laboratory equipment and facilities per week.
Final Exam
THU, DECEMBER 19TH
07:00 pm - 10:00 pm
Physics Building 2
Other classes by Grigory Tikhomirov
Course Catalog Description
Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Class Notes
*To enroll in this class, select the lecture and 999L (placeholder) Lab section. Assignment to the actual lab sections will be managed by teaching staff.*
**Enrollment Permission seats are reserved for internal programs and are not open. Please DO NOT email the instructor or scheduling .. show more
**Enrollment Permission seats are reserved for internal programs and are not open. Please DO NOT email the instructor or scheduling .. show more
*To enroll in this class, select the lecture and 999L (placeholder) Lab section. Assignment to the actual lab sections will be managed by teaching staff.*
**Enrollment Permission seats are reserved for internal programs and are not open. Please DO NOT email the instructor or scheduling to request a seat** show less
**Enrollment Permission seats are reserved for internal programs and are not open. Please DO NOT email the instructor or scheduling to request a seat** show less
Rules & Requirements
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
Open Reserved Seats:
3 unreserved seats
1 reserved for Students with Enrollment Permission
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials