Spring 2023
ELENG 143 001 - LEC 001
Microfabrication Technology
Ali Javey
Jan 17, 2023 - May 05, 2023
Tu, Th
08:00 am - 09:29 am
Social Sciences Building 166
Class #:28487
Units: 4
Instruction Mode:
In-Person Instruction
Offered through
Electrical Engineering and Computer Sciences
Current Enrollment
Total Open Seats:
3
Enrolled: 62
Waitlisted: 0
Capacity: 65
Waitlist Max: 0
No Reserved Seats
Hours & Workload
6 hours of outside work hours per week, 3 hours of instructor presentation of course materials per week, and 3 hours of instructional experiences requiring special laboratory equipment and facilities per week.
Final Exam
THU, MAY 11TH
07:00 pm - 10:00 pm
Social Sciences Building 166
Social Sciences Building 60
Other classes by Ali Javey
+ 1 Independent Study
Course Catalog Description
Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Rules & Requirements
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
No Reserved Seats
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials