2022 Fall
ELENG 147 001 - LEC 001
Introduction to Microelectromechanical Systems (MEMS)
Kristofer S J Pister
Class #:27804
Units: 3
Instruction Mode:
In-Person Instruction
Offered through
Electrical Engineering and Computer Sciences
Current Enrollment
Total Open Seats:
8
Enrolled: 17
Waitlisted: 0
Capacity: 25
Waitlist Max: 12
No Reserved Seats
Hours & Workload
3 hours of instructor presentation of course materials per week, 5 hours of outside work hours per week, and 1 hours of the exchange of opinions or questions on course material per week.
Final Exam
MON, DECEMBER 12TH
11:30 am - 02:30 pm
Soda 306
Other classes by Kristofer S J Pister
Course Catalog Description
This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.
Rules & Requirements
Credit Restrictions
Students will receive no credit for El Eng 147 after taking El Eng 247A.
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
No Reserved Seats
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials