Spring 2026
ELENG 143 001 - LEC 001
Microfabrication Technology
Ali Javey
Class #:29175
Units: 4
Instruction Mode:
In-Person Instruction
Offered through
Electrical Engineering and Computer Sciences
Current Enrollment
Total Open Seats:
-2
Enrolled: 72
Waitlisted: 2
Capacity: 70
Waitlist Max: 0
No Reserved Seats
Course Materials Fees
$90 Course Materials & Service Fee
Hours & Workload
6 hours of outside work hours per week, 3 hours of instructor presentation of course materials per week, and 3 hours of instructional experiences requiring special laboratory equipment and facilities per week.
Other classes by Ali Javey
+ 1 Independent Study
Course Catalog Description
Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Class Notes
Phase 1 and 2 seats are open to ECE, EECS, CS, and non-EECS COE majors. Remaining seats open during the adjustment period.
*To enroll in this class, select the lecture and 999L (placeholder) Lab section. Assignment to the actual lab sections will be managed by teaching staff.*
*To enroll in this class, select the lecture and 999L (placeholder) Lab section. Assignment to the actual lab sections will be managed by teaching staff.*
Rules & Requirements
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Reserved Seating For This Term
Current Enrollment
No Reserved Seats
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials