Spring 2024
ELENG 143 107 - LAB 107
Microfabrication Technology
Class #:33154
Units: 4
Instruction Mode:
In-Person Instruction
Offered through
Electrical Engineering and Computer Sciences
Current Enrollment
Total Open Seats:
10
Enrolled: 0
Waitlisted: 0
Capacity: 10
Waitlist Max: 0
No Reserved Seats
Hours & Workload
6 hours of outside work hours per week, 3 hours of instructor presentation of course materials per week, and 3 hours of instructional experiences requiring special laboratory equipment and facilities per week.
Course Catalog Description
Integrated circuit device fabrication and surface micromachining technology. Thermal oxidation, ion implantation, impurity diffusion, film deposition, expitaxy, lithography, etching, contacts and interconnections, and process integration issues. Device design and mask layout, relation between physical structure and electrical/mechanical performance. MOS transistors and poly-Si surface microstructures will be fabricated in the laboratory and evaluated.
Rules & Requirements
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
No Reserved Seats
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials