Spring 2023
ELENG C247B 001 - LEC 001
Formerly Electrical Engineering C245, Mechanical Engineering C218
Introduction to MEMS Design
Jeronimo Segovia Fernandez
Class #:28514
Units: 4
Instruction Mode:
In-Person Instruction
Offered through
Electrical Engineering and Computer Sciences
Current Enrollment
Total Open Seats:
9
Enrolled: 6
Waitlisted: 0
Capacity: 15
Waitlist Max: 15
No Reserved Seats
Hours & Workload
1 hours of the exchange of opinions or questions on course material per week, 8 hours of outside work hours per week, and 3 hours of instructor presentation of course materials per week.
Final Exam
WED, MAY 10TH
11:30 am - 02:30 pm
Cory 293
Course Catalog Description
Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required.
Rules & Requirements
Requisites
- Graduate students NOT in the Master of Engineering Program other those in EECS
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
No Reserved Seats
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials