2023 Fall

ELENG 147 001 - LEC 001

Introduction to Microelectromechanical Systems (MEMS)

Ming-Chiang A Wu

Aug 23, 2023 - Dec 08, 2023

Tu, Th

05:00 pm - 06:29 pm

Social Sciences Building 170

Class #:28234

Units: 3

Instruction Mode: In-Person Instruction

Offered through Electrical Engineering and Computer Sciences

Current Enrollment

Total Open Seats: 3

Enrolled: 17

Waitlisted: 0

Capacity: 20

Waitlist Max: 10

No Reserved Seats

Hours & Workload

3 hours of instructor presentation of course materials per week, 5 hours of outside work hours per week, and 1 hours of the exchange of opinions or questions on course material per week.

Final Exam

THU, DECEMBER 14TH

11:30 am - 02:30 pm

Social Sciences Building 170

Other classes by Ming-Chiang A Wu

This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.