2022 Fall
MECENG 119 001 - LEC 001
Introduction to MEMS (Microelectromechanical Systems)
Liwei Lin, Kamyar Behrouzi
Class #:28404
Units: 3
Instruction Mode:
In-Person Instruction
Offered through
Mechanical Engineering
Current Enrollment
Total Open Seats:
11
Enrolled: 24
Waitlisted: 0
Capacity: 35
Waitlist Max: 10
Open Reserved Seats:
9 reserved for Undergraduate Students - Excludes Visiting Students
5 reserved for Mechanical Engineering, Joint Materials Science Engineering/Mechanical Engineering, and Joint Mechanical Engineering/Nuclear Engineering Majors
Hours & Workload
3 hours of instructor presentation of course materials per week, and 6 hours of outside work hours per week.
Final Exam
FRI, DECEMBER 16TH
07:00 pm - 10:00 pm
Etcheverry 3106
Other classes by Liwei Lin
Other classes by Kamyar Behrouzi
Course Catalog Description
Fundamentals of microelectromechanical systems including design, fabrication of microstructures; surface-micromachining, bulk-micromachining, LIGA, and other micro machining processes; fabrication principles of integrated circuit device and their applications for making MEMS devices; high-aspect-ratio microstructures; scaling issues in the micro scale (heat transfer, fluid mechanics and solid mechanics); device design, analysis, and mask layout.
Rules & Requirements
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
Open Reserved Seats:
9 reserved for Undergraduate Students - Excludes Visiting Students
5 reserved for Mechanical Engineering, Joint Materials Science Engineering/Mechanical Engineering, and Joint Mechanical Engineering/Nuclear Engineering Majors
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials
Associated Sections
None