2021 Fall
ELENG 247A 001 - LEC 001
Introduction to Microelectromechanical Systems (MEMS)
Kristofer S J Pister
Class #:27856
Units: 3
Instruction Mode:
In-Person Instruction
Offered through
Electrical Engineering and Computer Sciences
Current Enrollment
Total Open Seats:
9
Enrolled: 11
Waitlisted: 0
Capacity: 20
Waitlist Max: 12
Open Reserved Seats:
9 reserved for Students not in the Master of Engineering Program
Hours & Workload
3 hours of instructor presentation of course materials per week, 5 hours of outside work hours per week, and 1 hours of the exchange of opinions or questions on course material per week.
Final Exam
FRI, DECEMBER 17TH
08:00 am - 11:00 am
Cory 540AB
Other classes by Kristofer S J Pister
Course Catalog Description
This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.
Class Notes
Rules & Requirements
Credit Restrictions
Students will receive no credit for EE 247A after taking EE 147.
Repeat Rules
Course is not repeatable for credit.
Reserved Seats
Current Enrollment
Open Reserved Seats:
9 reserved for Students not in the Master of Engineering Program
Textbooks & Materials
See class syllabus or https://calstudentstore.berkeley.edu/textbooks for the most current information.
Guide to Open, Free, & Affordable Course Materials